发明名称 Charge-giving body, and pattern-formed body using the same
摘要 A main object of the present invention is to provide a charge-giving body capable of forming a pattern having a minute structure on a surface of a semiconductor by a simple process; and a minute pattern-formed body. The present invention is a charge-giving body, comprising a defected region in which defect is introduced into a crystal structure in a crystalline semiconductor surface, charge being given from the defected region.
申请公布号 US6916522(B2) 申请公布日期 2005.07.12
申请号 US20020314540 申请日期 2002.12.09
申请人 WASEDA UNIVERSITY 发明人 HOMMA TAKAYUKI
分类号 B32B3/00;B32B9/00;C23C18/16;C23C18/18;H01L21/288;H01L29/34;(IPC1-7):B32B3/00 主分类号 B32B3/00
代理机构 代理人
主权项
地址