MICROACTIONNEUR PYROTECHNIQUE DOUBLE EFFET POUR MICROSYSTEME ET MICROSYSTEME UTILISANT UN TEL MICROACTIONNEUR

摘要

A microactivator comprising a hermetically sealed principal chamber in a solid support material containing a principal pyrotechnic charge and closed by a deformable membrane such that the gases emitted by the principal charge can increase the volume of the chamber by deformation of the membrane and a means of evacuating the gases from the principal chamber. The means of evacuation of the gases is operable on command and comprises a channel between one end of the principal chamber and the outside of the support, which is closed during deformation of the membrane and comprises means of opening. Alternatively the means of evacuating the gases comprises a channel between the end of the principal chamber and a second hermetically sealed chamber, which is closed during deformation of the membrane and comprises a means of opening. The closure of the channel is a stopper in the form of a pyrotechnic charge. A further pyrotechnic charge may be located in one of the two chambers. The pyrotechnic charges are either deposited on a heating conductive track at a thickness below 200 mum or have the form of a film covering a cavity formed in the support. The activator may further comprise a solid piece displaced by movement of the membrane and preferably pivoting to block a fluid channel. Independent claims are included for (1) a microsystem including a microactivator in which a supple membrane is located in an annular space integrated into a throat and constituting the principal chamber, the pyrotechnic charge located in an annular space integrated with a throat of smaller dimensions than that in which the membrane is located and positioned concentrically with respect to it, the two throats intercommunicating via one or more openings and a elastic membrane covered solid plate resting on the principal chamber, covering the membrane and obstructing a fluid canal, so that on combustion of the charge the plate is displaced by the membrane and causes an aspiration of fluid into the space created by the membrane in moving away from the support; (2) a microsystem in which the membrane deforms to obstruct a fluid canal; (3) a method of operating a microactivator to obtain a closure or opening of a microcircuit followed respectively be an opening or a closure; (4) a method of operating a microactivator to give and opening or closure, closure or opening and a further closure or opening.