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经营范围
发明名称
An apparatus and a method for cleaning a wafer carrier.
摘要
申请公布号
HK1046660(A1)
申请公布日期
2005.07.08
申请号
HK20020108130
申请日期
2002.11.08
申请人
ENTEGRIS, INC.
发明人
HALBMAIER, DAVID, L.
分类号
B08B3/02;B08B9/08;B08B9/093;H01L21/00;(IPC1-7):B08B
主分类号
B08B3/02
代理机构
代理人
主权项
地址
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