| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly reliable magnetic resistance sensor element whose surface is superior in flatness, which is not deformed by stress from sealing resin, and in which a cured resin film superior in heat resistance and crack resistance is used for an insulating film between a control circuit and a magnetic resistance thin film. SOLUTION: In the magnetic resistance sensor element, the insulating film is the cured film of silicon polymer, where respective chemical structure units of general formulas (1), (2), (3) and (4) are combined. A general formula (1) is [Si(O<SB>1/2</SB>)<SB>4</SB>]<SB>k</SB>, a general formula (2) is [R<SB>1</SB>Si(O<SB>1/2</SB>)<SB>3</SB>]<SB>l</SB>, a general formula (3) is [R<SB>2</SB>R<SB>3</SB>Si(O<SB>1/2</SB>)<SB>2</SB>]<SB>m</SB>and a general formula (4) is shown by [R<SB>4</SB>R<SB>5</SB>R<SB>6</SB>SiO<SB>1/2</SB>]<SB>n</SB>(k≥1, l≥1, m≥1, n≥1, R<SB>1</SB>, R<SB>2</SB>, R<SB>3</SB>, R<SB>4</SB>, R<SB>5</SB>and R<SB>6</SB>are an aryl group, a hydrogen atom, a trialkylsilyl group or a functional group having unsaturated bond and the species can be the same or different). COPYRIGHT: (C)2005,JPO&NCIPI
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