发明名称 Umkehrprägetechnik
摘要 The present invention relates to a method for imprinting a micro-/nano-structure on a substrate, the method comprising (a) providing a mold containing a desired pattern or relief for a microstructure; (b) applying a polymer coating to the mold; and (c) transferring the polymer coating from the mold to a substrate under suitable temperature and pressure conditions to form an imprinted substrate having a desired micro-/nano-structure thereon.
申请公布号 DE10297731(T5) 申请公布日期 2005.07.07
申请号 DE2002197731T 申请日期 2002.05.08
申请人 AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH;THE REGENTS OF THE UNIVERSITY OF MICHIGAN, ANN ARBOR 发明人 HUANG, XUDONG;BAO, LI-RONG;CHENG, XING;J. GUO, LINGJIE;PANG, STELLA W.;YEE, ALBERT F.;GUO, LINGJIE J.
分类号 B29C33/42;B81C1/00;G03F7/00;H01L21/027;H05K3/00;(IPC1-7):G03F7/00;B41M1/26;B41M1/06;B41M1/28;B41M1/30;B41M1/34;B81B7/00;B82B1/00 主分类号 B29C33/42
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