| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a field emission display device superior in electron beam focusing. <P>SOLUTION: A field emission device has a glass substrate 30; an emitter electrode 32 formed on the glass substrate 30; an CNT emitter 46 formed on the emitter electrode 32; and a gate stacking layer S1 formed around the CNT emitter 46 for emitting an electron beam from the carbon nanotube (CNT) emitter 46 to be focussed at a given position. The gate stacking layer S1 has a mask layer covering the emitter electrode 32 which surrounds the CNT emitter 46, a gate insulating film 36 formed at the predetermined height of a mask layer, a mirror electrode 37 formed on the inclined plane of the gate insulating film 36, and a gate electrode 38 formed on the gate insulating film 36 separated from the mirror electrode 37, and a focus cascade insulating film 40 and a focus cascade electrode 42 successively formed on the gate electrode 38. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
