INTERACTIVE THRESHOLD TUNING IN AN INSPECTION SYSTEM

摘要

Characteristics of an inspection piece are sensed and analyzed to identify anomalies having level information. The level information is analyzed with an initial set of thresholds of inspection system parameters, and an initial portion of the anomalies are flagged as defects. A summary of the flagged anomalies is displayed, and an operating curve of potential flagged defects versus threshold parameters is also displayed. The parameters are selectively changed to form modified thresholds, and the level information of the anomalies is analyzed with the modified thresholds. An updated portion of anomalies is flagged as defects based on the immediately preceding analysis of the level information, and a summary of the flagged anomalies is displayed along with the recomputed operating curves. The steps of selectively changing thresholds and reflagging defects are repeated as desired, and the modified set of thresholds parameters is stored for use in an inspection system recipe.