| 摘要 |
PROBLEM TO BE SOLVED: To obtain a membrane-forming composition which is capable of forming a membrane having a low dielectric constant and an excellent surface eveness and which is suitable for a material of a layer-insulation membrane. SOLUTION: The membrane-forming composition contains (A) a hydrolytic condensate, obtained by hydrolyzing and condensing silane compounds containing a compound expressed by the formula (1): (R<SP>1</SP>OCH<SB>2</SB>)<SB>a</SB>Si(OR<SP>2</SP>)<SB>4-a</SB>[wherein, R<SP>1</SP>and R<SP>2</SP>are each a univalent organic group; and (a) is 1 or 2], and (B) an organic solvent. COPYRIGHT: (C)2005,JPO&NCIPI
|
