SYSTEM UND VERFAHREN ZUM AUSFÜHREN VON BESTIMMTEN OPTISCHEN MESSUNGEN

摘要

A system and method for performing selected optical measurements on a sample is provided utilizing an optical coherence domain reflectometer which includes a diffraction grating. A broad band light source produces light having a short coherence length. A beamsplitter splits the light into a signal beam and a reference beam. A reference mirror is disposed to receive the reference beam. A lens brings the signal beam to focus on the sample. A diffraction grating receives a reflection from the sample and from the reference mirror, the reflections being incident on the diffraction grating with respect to said diffraction grating normal such that the positive and negative first or second or higher diffraction orders from said reflections received propagate along a normal to said diffraction grating. A lens collects the diffracted orders from the diffraction grating and brings the diffracted orders to focus on a detector, the detector producing an output of said positive and negative first diffracted orders received. A computer processes the output from the detector.