发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor device in which the reduction of a production yield is suppressed with a simplified manufacturing process, to provide an adhesive sheet for use in this method, and to provide the semiconductor device obtained by this method. <P>SOLUTION: This method for manufacturing the semiconductor device comprises the a temporarily securing step of temporarily securing a semiconductor element 13 onto a board or the like 11 by an adhesive sheet 12, and the wire bonding step of performing a wire bonding not through the heating step. A shear adhering force at the temporary securing onto the board or the like 11 of the adhesive sheet 12 is 0.2 MPa or more. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005183703(A) 申请公布日期 2005.07.07
申请号 JP20030423118 申请日期 2003.12.19
申请人 NITTO DENKO CORP 发明人 MISUMI SADAHITO;MATSUMURA TAKESHI;HOSOKAWA KAZUTO;KONDO HIROYUKI
分类号 H01L21/52;H01L21/58;H01L21/60;H01L21/607;H01L21/68;H01L21/98;H01L25/065 主分类号 H01L21/52
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