ULTRA HIGH-SPEED VACUUM PUMP SYSTEM WITH FIRST STAGE TURBOFAN AND SECOND STAGE TURBOMOLECULAR PUMP

摘要

PROBLEM TO BE SOLVED: To provide an ultra high-speed vacuum pump evacuation system having a first stage ultra-high speed turbofan and a conventional second stage turbomolecular pump. SOLUTION: The turbofan 11 is connected in series to a chamber 30 to be evacuated or completely installed in the chamber. The turbofan uses a large diameter moving blade to provide an ultra-high speed discharge speed to a fluid. The conventional second stage turbomolecular pump 18 is hydraulically connected to the downstream side of the first stage turbofan. The turbofan has an approximately middle compression ratio though providing a speed at a large volume of flow to fluid particles. Then, the turbomolecular pump compresses the fluid to a pressure for evacuating the chamber by a roughing pump. COPYRIGHT: (C)2005,JPO&NCIPI