| 摘要 |
PROBLEM TO BE SOLVED: To provide a rotation coater capable of improving film thickness accuracy of a coating film. SOLUTION: A chuck 2 for retaining a substrate 1 is rotated by a motor 3. A defined amount of coating material 10 is added dropwise onto the substrate 1 from a nozzle 11 provided above the chuck 2. A dropwise addition completion detection part 20 for detecting the time of completion of dropwise addition of the coating material 10 from the nozzle 11 is provided. The detection result by the dropwise addition completion detection part 20 is transmitted to a control part 30 and the control part 30 controls the rotation speed of the motor 3 based on the detection result. The dropwise addition completion detection part 20 is arranged such that luminous flux 4 obtained by transmitting the light emitted from a light source 21 through a lens 22 crosses a linear line connecting a nozzle 11 tip end and a substrate 1 surface. COPYRIGHT: (C)2005,JPO&NCIPI
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