| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a structure which has a groove or hole that can form a shape changing the depth such as a curved shape or a funnel shape at a groove bottom part by a good controllability. SOLUTION: The manufacturing method for the structure in which the groove or hole 205 changing the depth by points is formed at a substrate 201 includes a mask formation process of forming an etching mask layer 203 on the substrate 201, and an etching process of forming the desired groove or hole 205. In the etching process, the substrate 201 is etched with the use of the etching mask layer 203, thereby transiently forming a plurality of component grooves 204 adjacent to each other via side walls. Thereafter, the etching is further advanced to link the plurality of component grooves 204 each other so that an envelope of bottom faces of the plurality of component grooves 204 nearly corresponds to a bottom face of the desired groove or hole. COPYRIGHT: (C)2005,JPO&NCIPI
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