发明名称 MANUFACTURING METHOD OF INORGANIC SUBSTANCE PATTERN, INORGANIC SUBSTANCE PATTERN AND FRONT FACE PLATE FOR PLASMA DISPLAY PANEL
摘要 <P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an inorganic substance pattern of a highly accurate and uniform pattern shape, an inorganic substance pattern, and a front face plate for a plasma display panel. <P>SOLUTION: The manufacturing method of the inorganic substance pattern includes at least (I) a process of crimping an element having a photosensitive resin composition layer containing inorganic substance particles on a support body film, (II) a process of exposing and curing the photosensitive resin composition layer containing the inorganic substance particles, (III) a process of further laminating and crimping the element having the photosensitive resin composition layer containing the inorganic substance particles on the cured photosensitive resin composition layer, (IV) a process of irradiating active light beam in image on the photosensitive resin composition layer containing the inorganic substance particles, (V) a process of selectively removing the photosensitive resin composition layer containing the inorganic substance particles irradiated in image with the active light rays by development and forming a pattern made of a photosensitive resin composition containing inorganic particles on the resin composition layer containing the cured inorganic substance particles, and (VI) a process of forming an inorganic substance pattern by baking the above pattern, on a base plate having electrodes. Thus, the inorganic substance pattern and the front face plate for the plasma display panel are provided. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005183028(A) 申请公布日期 2005.07.07
申请号 JP20030417984 申请日期 2003.12.16
申请人 HITACHI CHEM CO LTD 发明人 TANAKA HIROYUKI;YAMADA NAOKI;YAMAZAKI HIROSHI;FURUBAYASHI HIROMI;OHARA MASAHARU
分类号 G03F7/004;G03F7/11;G03F7/40;H01J9/02;H01J11/22;H01J11/34;H01J11/38 主分类号 G03F7/004
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