| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron gun which can emit thermoelectrons at comparatively low temperatures and in which power saving and uniformity of illuminance can be obtained, and an electron beam projection and exposure device equipped with such electron gun. <P>SOLUTION: The electron gun 1 comprises an electron source member (chip) 3 and a holder 7 which surrounds the portion other than the electron emission face 3a of the chip 3. The chip 3 is made of LaB<SB>6</SB>and the holder 7 is produced by a material having a high melting point and a high work function. The chip 3 is fitted in the holder 7 through pieces 5, 5a made of carbon. Since the LaB<SB>6</SB>has a property of emitting the thermoelectron at low temperatures (about 1,200°C ), the temperature of the electron emission face 3a of the chip 3 is easily made uniform and the thermoelectrons can be emitted at a uniform electron density. Then, the thermoelectrons emitted from the holder 7 can be suppressed to a small level. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
