发明名称 Source of liquid metal ions and a method for controlling the source
摘要 The invention provides a system and method for controlling a source of liquid metal ions, the source comprises a tip a first electrode and a second electrode, the method includes the steps of: (i) maintaining the first electrode at a first voltage level range and maintaining the second voltage at a second voltage range, such as to extract metal ions formed on a tip of the source, during an active mode of operation of the source; and (ii) maintaining the first electrode at a third voltage level range and maintaining the second voltage at a fourth voltage level range, such as to substantially reduce an extraction of metal ions from the tip, during an idle mode of operation of the source. The third voltage level range and, alternatively or additionally, the fourth voltage level ranges does not include zero voltage level. The first voltage level range differs than the third voltage level range.
申请公布号 US6914386(B2) 申请公布日期 2005.07.05
申请号 US20030667875 申请日期 2003.09.22
申请人 APPLIED MATERIALS ISRAEL, LTD. 发明人 PEARL ASHER
分类号 G01N27/62;H01J27/02;H01J27/22;H01J37/08;H01J49/10;(IPC1-7):H01J27/22 主分类号 G01N27/62
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