DEVICE AND METHOD FOR SUBSTRATE PROCESSING

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing device and a substrate processing method by which a collision of a substrate transfer means and an obstacle can be prevented. SOLUTION: A camera 10 is fixed onto a camera fixture 14 extending from the rear end of an arm 11 to its front upper side. The camera 10 photographs the extension direction of the arm 112 as a static image when a substrate W is shipped in/out. When a normal static image recorded beforehand of a hot plate HP1 matches with the static image photographed by the camera 10, a substrate transfer robot TR ships in/out the substrate W. COPYRIGHT: (C)2005,JPO&NCIPI