| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating method and a heating device capable of quickly equalizing the temperature distribution in a heating region between a plurality of panel-like heaters disposed in parallel with one another in a simple structure at a low cost, and of accurately evenly heating a heating object. SOLUTION: By this heating device provided with the plurality of panel-like heaters 3 arranged in parallel with one another with spaces, the heating object disposed so as to face to the heating surfaces of the heaters 3 is heated between the heaters 3 adjacent to one another. Gas flow holes 21 to allow chambers adjacent to each other to communicate with each other are formed in barrier ribs 21 for dividing a gas flow space formed in the inside of each heater 3 into a chamber 20a in the vicinity of the center and chambers 20b adjacent to the circumferences. A gas at a temperature lower than the set temperature of the heaters 3 is introduced into each chambers 20a in the vicinity of the center, and the gas is run from the centers of the heating surfaces 3 toward the circumferences thereof. The plurality of chambers 20b adjacent to the circumferences are adjacent to the chamber 20a in the vicinity of the center. COPYRIGHT: (C)2005,JPO&NCIPI
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