| 摘要 |
PROBLEM TO BE SOLVED: To allow an ultrathin film section specimen obtained by microtome or the like to be collected at a desired position on a mesh easily and accurately. SOLUTION: The mesh for retaining a sample for an electron microscope has a region for retaining and observing the sample and a peripheral portion around the region. The region and the peripheral portion are different in hydrophilic property. The region has a higher hydrophilic property than that of the peripheral portion. A manufacturing method of the mesh employs sputtering and includes the steps of: covering a target electrode with an electrode plate for hydrophilic treatment in a chamber; placing a mesh having a plastic supporting film applied thereon directly below the electrode plate, with a carbon film surface facing upward, and placing a mask on the mesh; and subjecting a portion of the mesh that is not covered with the mask to hydrophilic treatment by generating a glow discharge by voltage application after evacuating the chamber. COPYRIGHT: (C)2005,JPO&NCIPI
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