摘要 |
<p>A fluid mixing device ( 30 ) used for processing fluid, including a first fluid feed passage ( 34 ) for feeding first fluid, a second fluid feed passage ( 43 ) for feeding second fluid, and a mixing part ( 41 ) for generating mixed fluid by mixing the first fluid with the second fluid, wherein the first fluid feed passage ( 34 ) is branched into a first route ( 37 ) and a second route ( 38 ) through a flow ratio regulating part ( 36 ), the second route ( 38 ) is branched, at a branch part ( 39 ), to a third route ( 40 ) with a preset flow ratio, the third route ( 40 ) is connected to the mixing part ( 41 ), the second fluid feed passage ( 43 ) and a fourth route ( 44 ) are connected to the mixing part ( 41 ), the mixed flow generated by mixing, in the mixing part ( 41 ), the first fluid flowing in from the third route ( 40 ) with the second fluid flowing in from the second fluid passage ( 43 ) flows out to the fourth route ( 44 ), the fourth route ( 44 ) is merged to the second route ( 38 ) on the downstream side of the branch part ( 39 ), and the second route ( 38 ) is merged to the first route ( 37 ), whereby the specific resistant value of the processing fluid can be accurately set to a specified value by an economical method.</p> |