| 摘要 |
PROBLEM TO BE SOLVED: To provide a teaching method by which the position of a boat and the position of a wafer transfer device can be automatically adjusted by an optical position transducer. SOLUTION: In a wafer transfer device with n teeth for transferring wafer to a boat, a light beam source is provided on the upper position (position where a wafer is placed) so that it may be horizontal to the respective teeth. An optical position transducer is provided on the side of the boat, and it detects the position and angle of the wafer from a light emitted from the light beam source when the tooth of the transfer device is engaged with a groove of the boat. Thus, the transfer position can be automatically adjusted beforehand without loading the wafer. COPYRIGHT: (C)2005,JPO&NCIPI |
