| 摘要 |
PROBLEM TO BE SOLVED: To provide a lapping device capable of finishing a workpiece with improved uniformity and high accuracy by easily removing chips and fallen abrasive grains, positively preventing the plugging of a lapping film and preventing the degradation of a work environment and a harmful effect on the environment in waste liquid disposal. SOLUTION: A strip lapping film provided with abrasive grains on one face of a thin-walled base material is pressurized by a shoe 21 and pressed to the workpiece W, and the workpiece W is rotated by a rotating drive means and the ground. At this time, a fluid is made into mist by a lubricating cooling means 30 for the machined surface of the workpiece W and supplied to grooves or holes formed in the lapping film. COPYRIGHT: (C)2005,JPO&NCIPI |
