| 摘要 |
PROBLEM TO BE SOLVED: To remove dust firmly press-fixed to a cleaning object such as a magnetic transfer master and firmly stuck thereto by anchor effect with a high removing ratio. SOLUTION: This apparatus is provided with a first cleaning mechanism 3 performing a first cleaning process of spraying dry ice particles against the cleaning object W held to a stage 2, and a second cleaning mechanism 4 performing a second cleaning process of pressing/peeling an adhesive member 5 against the cleaning object W after the first cleaning. Sticking force of stuck dust is weakened by dry ice cleaning to perform adhesion removal by the adhesive member 5. At least one of the first and second cleaning processes is preferably performed for several times to enhance the removing ratio. COPYRIGHT: (C)2005,JPO&NCIPI
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