| 摘要 |
PROBLEM TO BE SOLVED: To provide a fan filter unit which is capable of enhancing the efficiency thereof with a low noise, lowering the chamber height and uniformizing the blow-out wind speed and has excellent assembly and maintenance with regard to the fan filter unit used in a clean room requiring a clean space in a semiconductor plant, a food plant and the like. SOLUTION: A plurality of motors 2 are fixed on one fixing stand 3 attached to the side surface of the chamber 101 or the upper part of the chamber 101 having a suction port 1, thereby, the axial height of the fan 102 and the outer diameter of the fan 102 per one set is reduced, the height of the chamber 101 is lowered, the region of low wind speed on the back side of the fan 102 is reduced, the wind speed distribution is uniformized and, thus, the fan filter unit having excellent assembly and maintenance can be obtained. COPYRIGHT: (C)2005,JPO&NCIPI
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