申请人 |
APPLIED MATERIALS, INC.;LI, LIHUA;TANAKA, TSUTOMU;HUANG, TZU-FANG;XIA, LI-QUN;SUGIARTO, DIAN;SIVARAMAKRISHNAN, VISWESWAREN;LEE, PETER, WAI-MAN;SILVETTI, MARIO, D. |
发明人 |
LI, LIHUA;TANAKA, TSUTOMU;HUANG, TZU-FANG;XIA, LI-QUN;SUGIARTO, DIAN;SIVARAMAKRISHNAN, VISWESWAREN;LEE, PETER, WAI-MAN;SILVETTI, MARIO, D. |