发明名称 LIQUID-PRESSURIZING MECHANISM, AND APPARATUS AND METHOD FOR CONTROLLING LIQUID USING IT
摘要 PROBLEM TO BE SOLVED: To provide a liquid-pressurizing mechanism which can pressurize a liquid to a predetermined pressure and add minute flow volume by flow volume with high precision, wherein the gas for pressurizing the liquid will not come into contact with the liquid so that various problems occurring when the pressurizing gas is in direct contact with the liquid are solved. SOLUTION: An entrance 3a connected to the supply line 32 of a chemical etc. and a holding chamber 12 are provided to one side of a cylindrical pressurizing body 2, and a pressurizing chamber 13 for pressurizing by a gas, such as compressed air is provided on the other side of the pressurizing body 2; and a partition 6 is provided so that the gas in the pressurizing chamber 13 and the liquid in the holding chamber 12 do not come into contact with each other. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005175183(A) 申请公布日期 2005.06.30
申请号 JP20030412723 申请日期 2003.12.11
申请人 KITZ SCT:KK 发明人 KAZAMA KATSUHIKO
分类号 H01L21/304;(IPC1-7):H01L21/304 主分类号 H01L21/304
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