发明名称 Method and device for manufacturing bonding pads for chip scale packaging
摘要 An integrated circuit chip and method of manufacture. The chip has a substrate, e.g., silicon, silicon on insulator, epitaxial wafer. The substrate has a plurality of chip structures. A plurality of bonding pads are disposed on the substrate. Each of the bonding pads is formed from an aluminum bearing material or other like material. A surface region is formed on each of the bonding pads. An under bump metal layer ("UBM") is overlying the surface region. A wetting layer is formed overlying the under bump metal layer. The wetting layer comprises a plurality of protrusions extending out of the wetting layer and disposed spatially on the wetting layer. A bump layer is formed overlying the wetting layer and is mechanically coupling to the plurality of protrusions.
申请公布号 US2005140027(A1) 申请公布日期 2005.06.30
申请号 US20040773800 申请日期 2004.02.06
申请人 SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION 发明人 FAN YUAN-HENG
分类号 H01L21/60;H01L23/485;(IPC1-7):H01L21/44;H01L23/48;H01L23/52;H01L29/40 主分类号 H01L21/60
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