| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flow sensor in which miniaturization can be realized without receiving limitation in installation attitude, without causing convection flow even using a shunt structure. <P>SOLUTION: The flow sensor is constituted in such a manner that a flat surface section of top face of silicon substrate 11, and an inverse U groove of upper case 2, form the inverse U shape sensing flow path 10, and on a flat part of upstream side of the mutually parallel sensing flow path 10 in an inverse U shape on the silicon substrate 11 thin film resistors 6a, and 6b are provided, and on the flat part of downstream side on the silicon substrate 11 the thin film resistor 7a, and 7b are provided. Then, the thin film resistors 6a, and 7a, and the thin film resistors 6b, and 7b are serially connected respectively. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
