| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrier hand easily performing high-speed movement of an object to be carried because of lightweight, preventing the generation of distortion because of high rigidity, and obtaining a high heat discharging characteristic. SOLUTION: The carrier hand includes honeycomb construction consisting of an SiC-Si composite material in which the content rate of SiC is 40-80 vol%, and plates consisting of the SiC-Si composite material are joined to the upper and lower surfaces of the honeycomb construction. The lightweight carrier hand having high rigidity and high heat radiation is obtained. Consequently, effects that an object to be carried is moved at a high speed and thermal distortion due to heat accumulation is not applied to the object to be carrier, are obtained. COPYRIGHT: (C)2005,JPO&NCIPI
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