| 摘要 |
PROBLEM TO BE SOLVED: To provide an atomic force microscope for returning to a state, where a sample image can be observed again, as soon as possible even if a cantilever comes into contact with the sample. SOLUTION: A scanning type probe microscope comprises a means for detecting a decrease in amplitude for detecting that the amplitude of the cantilever goes below a prescribed threshold; a starting signal generating means for generating a starting signal for starting the cantilever; a separation signal generating means for generating a separation signal for increasing the distance between the sample and the probe; and a switching control means for supplying a separation signal from the separation signal generating means to a traveling means by an output signal from the amplitude decrease detection means for increasing the distance between the sample and the probe, when the amplitude decrease detection means detects that the output of the signal conversion means went lower than the prescribed threshold, and performs switching control so that a starting signal from the starting signal generating means is sent to the vibrating means. COPYRIGHT: (C)2005,JPO&NCIPI
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