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发明名称
MANUFACTURING METHOD OF SUBSTRATE FOR SEMICONDUCTOR DEVICE AND MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20050066932(A)
申请公布日期
2005.06.30
申请号
KR20040015070
申请日期
2004.03.05
申请人
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
发明人
KWON, SUNG KU;ROH, TAE MOON;YU, BYOUNG GON;KIM, JONG DAE
分类号
H01L29/78;(IPC1-7):H01L29/78
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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