METHOD OF MANUFACTURING POLYURETHANE FOAM FOR POLISHING PAD WITH MICROCAVITY

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing polyurethane foam with micro and uniform cavities.

SOLUTION: The method of manufacturing the polyurethane foam for a polishing pad with microcavities comprises an agitating process for mixing an isocyanate component and a reaction component containing an active hydrogen group containing a compound, in a container by an agitator with an agitating blade to obtain a foaming reaction liquid; a process for extracting the agitating blade from the foaming reaction liquid; and a reaction process for reaction-curing the foaming reaction liquid. In the agitating process, a scraper makes at least one round along the internal wall surface of a container.

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