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发明名称
PLANAR VOLTAGE CONTRAST TEST STRUCTURE AND METHOD
摘要
申请公布号
SG112043(A1)
申请公布日期
2005.06.29
申请号
SG20040006562
申请日期
2004.09.09
申请人
CHARTERED SEMICONDUCTOR MANUFACTURING LTD.
发明人
VICTOR LIM SENG KEONG;DENNIS TAN;SIMON CHAN TZE HO
分类号
G01R31/28;G01R31/307
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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