发明名称 |
METHOD AND SYSTEM FOR DYNAMIC MODELING AND RECIPE OPTIMIZATION OF SEMICONDUCTOR ETCH PROCESSES |
摘要 |
A method and system are disclosed for creating dynamic models of etch processes in semiconductor manufacturing. In one embodiment, a method comprises modeling an etch process used in semiconductor manufacturing to generate a dynamic process model. The dynamic process model is used to determine input values that result in a desired output value. A process recipe is optimized for the etch process with the input values. |
申请公布号 |
EP1546876(A2) |
申请公布日期 |
2005.06.29 |
申请号 |
EP20030770274 |
申请日期 |
2003.08.28 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
LI, KUN;ERICKSON, MARK, A.;KANELLAKOPOULOS, IOANNIS |
分类号 |
H01L21/311;G06F17/50;G06F19/00;H01L21/66;(IPC1-7):G06F9/45;H01L21/320;H01L21/476 |
主分类号 |
H01L21/311 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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