Carbon dioxide gas laser machining method of multilayer material

摘要

In a carbon dioxide laser machining method of a multilayer material of applying carbon dioxide laser light to a machined part of a multilayer material having an insulation layer and a first conductor layer and a second conductor layer deposited with the insulation layer between and removing the first conductor layer and the insulation layer of the machined part to form a blind hole or a groove arriving at the second conductor layer, the laser light is applied to the machined part like pulses at an energy density of 25 J/cm² or more for beam ON time in the range of 1 mus to 10 mus.