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发明名称
PLASMA FLOOD GUN OF ION IMPLANT APPARATUS
摘要
申请公布号
KR100497192(B1)
申请公布日期
2005.06.28
申请号
KR20020076819
申请日期
2002.12.05
申请人
发明人
分类号
H01L21/265;(IPC1-7):H01L21/265
主分类号
H01L21/265
代理机构
代理人
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地址
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