| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning method capable of cleaning off a film to be removed which is made of a metal oxide film or metal silicate film sticking on the surface of an object to be washed which is made of aluminum or aluminum alloy without giving large damage such as corrosion to the object to be washed. SOLUTION: For the cleaning method of washing away the film to be removed which is made of the metal oxide film sticking on the surface of an object to be washed which is made of at least one material selected from a group of aluminum, aluminum alloy, and nickel alloy; a cleaning solution is used which contains at least ammonium fluoride, hydrofluoric acid, and ethylene glycol or consists of an ammonium acetic acid solution. COPYRIGHT: (C)2005,JPO&NCIPI
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