| 摘要 |
PROBLEM TO BE SOLVED: To provide a monitoring method capable of confirming the action state of a function liquid consumption action by monitoring the action circumstance of the function liquid consumption action, a monitoring device, a drawing device, a manufacturing method for an electro-optical device, an electro-optical device and an electronic instrument. SOLUTION: In the monitoring method, the function liquid consumption action that the function liquid is consumed from a function liquid tank 51 for feeding the function liquid to a function liquid drop delivery head 16 through the function liquid drop delivery head 16 is monitored. The method is provided with a consumption trend measurement step for measuring aging consumption trend of the function liquid by the function liquid consumption action; a reference consumption trend obtaining step for obtaining the consumption trend corresponding to the measured consumption trend as reference consumption trend from a consumption table specifying, with age, the consumption trend from starting of action at normal action to completion of the action; and a determination step for determining whether or not the function liquid consumption action is normal by comparing the measured consumption trend with the reference consumption trend. COPYRIGHT: (C)2005,JPO&NCIPI |
