| 摘要 |
PROBLEM TO BE SOLVED: To provide the equipment that makes effective use of the clean room, minimizes the down time or the frequency of glass substrate vibration or foreign object adhesion and makes it possible to coat a large glass substrate. SOLUTION: This equipment comprises a loading conveyor for vertically transporting a glass substrate with both sides floated without contact, two film coaters (first coater and second coater) vertically attached to coat a film to both sides of the glass substrate that is carried out from the above loading conveyor, a coater transportation facility for moving the above first or second coater between the coating position and the supply position, an unloading conveyor for moving the glass substrate with both sides coated in the only direction, and a means for controlling the operations of the first and second film coaters of the above loading/unloading conveyor and the coater transportation facility. COPYRIGHT: (C)2005,JPO&NCIPI |
