| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm type pump for keeping high pump efficiency and improving durability of a diaphragm. SOLUTION: Inside of a device case 11 is partitioned by the diaphragm 14 to form a pump chamber 15. A rod 45 is attached to a center part of the diaphragm 14. By deformation of the diaphragm 14 caused by a reciprocating motion of the rod 45, gas is sucked in the pump chamber 15 or is discharged from the pump chamber 15. The rod 45 has a mounting part 46 to which the diaphragm 14 is attached, and a flange part 49 disposed outside the mounting part 46. The flange part 49 can abut on the diaphragm 14 by the deformation of the diaphragm 14 to a pump chamber 15 side. An abutting face 49a of the flange part 49 on the diaphragm 14 has a convex curved face area 51 continuous to the contact face 46a of the mounting part 14 with the diaphragm 14. COPYRIGHT: (C)2005,JPO&NCIPI
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