| 摘要 |
PROBLEM TO BE SOLVED: To provide an opening and closing device for a semiconductor manufacturing device capable of being easily miniaturized, having superior maintenance performance, and surely preventing the generation of dusts. SOLUTION: As a gate member for opening and closing an opening part can be operated only by vertical driving of a driving shaft, an opening and closing mechanism of the gate member can be remarkably simplified, and a complete non-sliding state of the gate member can be achieved as the application of the external force in the direction in parallel with the opening part, to the gate member in being opened, can be prevented. Further as the gate member, a guide frame member accommodating the gate member, an elastic supporting member and a cam mechanism are integrated as a compact gate cassette member, the gate cassette member can be mounted and demounted to a main body only by disassembling a part of a casing, as a result, the gate member can be easily taken out to the external, and the maintenance performance such as cleaning the gate member, can be remarkably improved. COPYRIGHT: (C)2005,JPO&NCIPI
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