| 摘要 |
<P>PROBLEM TO BE SOLVED: To cut down an amount of use of permanent magnet as compared with a prior art. <P>SOLUTION: A plurality of radial-direction magnetized permanent magnet segments arranged on the circumference, and at least one tangentially magnetized permanent magnet segment arranged on virtually the same circumference as the above plurality of radial-direction magnetized permanent magnet segments are included in the magnetic field generating device for multipolar magnetron plasma. A magnetizing direction of the tangentially magnetized permanent magnet segment is a tangential direction from the adjacent outwardly magnetized tangentially magnetized permanent magnet segment toward the adjacent inwardly magnetized tangentially magnetized permanent magnet segment, and a total cubic volume of at least one tangentially magnetized permanent magnet segment is to be 0.2 times or more and less than equal to a total cubic volume of the plurality of radial-direction magnetized permanent magnet segments. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
