| 摘要 |
PROBLEM TO BE SOLVED: To provide a solid-state imaging element lighting system having a simple structure for inexpensively performing lighting in conformity to the position of the incident pupil of each solid-state imaging element, its lighting F value, and its size. SOLUTION: Field lenses FL1 and FL2 can be inserted into and extracted from an optical system by an unillustrated mechanism. The power of the field lenses FL1 and FL2 is determined according to the specifications of solid-state imaging elements 6 and 7 to be inspected. That is, the power (focal distance) of the field lenses FL1 and FL2 is adapted to vary according to the positions of the incident pupils of the imaging elements 6 and 7. To say more precisely, such field lenses FL1 and FL2 are used so that the optical axis direction position of the exit pupils of the solid-state imaging element lighting system coincides with the positions of the incident pupils of the imaging elements 6 and 7 when putting the field lenses FL1 and FL2 into insertion. In inspecting the sensitivity, etc. of respective pixels of the imaging elements 6 and 7, no pattern is formed on the field lenses FL1 and FL2. COPYRIGHT: (C)2005,JPO&NCIPI |
