发明名称 PLATE MATERIAL TRANSPORT METHOD AND PLATE MATERIAL TRANSPORT APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a tabular material transport method, easily adjusting the operation corresponding to the size of a plate material without increase in installation floor area of a plate material transport apparatus even if the plate material is increased in size, and a plate material transport apparatus preferably for implementing the method. SOLUTION: A liquid A is injected to the tabular material P to maintain the tabular material P in an erected state, and the erected tabular material P is supported from below at the lower end face and simultaneously moved. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005162491(A) 申请公布日期 2005.06.23
申请号 JP20050023875 申请日期 2005.01.31
申请人 CORNING JAPAN KK;CHIKUMA TEKKOSHO:KK 发明人 SAKURAI TAKASHI;SUZUKI MICHIO;SHINKAI MASAYUKI;SAKURAI OSAMU;CHIKUMA TSUYOSHI
分类号 B65G21/20;B65G47/28;B65G49/06;H01L21/677;H01L21/68;(IPC1-7):B65G49/06 主分类号 B65G21/20
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