| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas sensor capable of realizing preferably-shaped comb teeth, and showing excellent performance, and provide its manufacturing method. SOLUTION: A pair of comb tooth-shaped electrodes 11, 13 are equipped with a plurality of lengthy comb teeth 31 arranged in parallel along the arrow Y direction, and screen printing is performed along the longitudinal direction (arrow Y direction) of the comb teeth 31. Especially, the dimension (distance in the arrow Y direction) of the width of the clearance 43 between each comb tooth 31 is approximately constant when measured at any position and has little dispersion, and the standard deviation to a mean value of the dimension of the width of the clearance 43 between each comb tooth 31 is≤2%. COPYRIGHT: (C)2005,JPO&NCIPI
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