In-situ monitoring method and system for mold deformation in nanoimprint

摘要

The present invention provides a method for in-situ real-time monitoring of mold deformation by using a database to store temporary information during the following steps: (a) providing a mark on the mold body that is easy to observe in order to monitor the mold deformation, (b) installing a signal source and a monitor device for monitoring the deformation quantity on the mold, (c) transforming the above deformation quantity into computer signals for storing in the database and (d) issuing controlling or warning signals to the imprinting machine based on the processing results of the stored information in the database.