发明名称 |
Method of erasing repeated patterns and pattern defect inspection device |
摘要 |
An image of a subject of inspection is picked up, and this image is demarcated into a plurality of areas. Density differences are found between reference pixels and a plurality of comparison pixels in the demarcated areas, and a density difference that is closest to 0 is determined as a specific density difference. The specific density difference is then applied to the reference density in the image of the subject, whereby repeated patterns in the image are erased.
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申请公布号 |
US6909798(B1) |
申请公布日期 |
2005.06.21 |
申请号 |
US20000629141 |
申请日期 |
2000.07.31 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
YUKAWA NORIAKI;KAWANO HAJIME;AYAKI YUKIHIRO |
分类号 |
G01N21/956;G06K9/00;G06T1/00;G06T7/00;(IPC1-7):G06K9/00 |
主分类号 |
G01N21/956 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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