| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a quartz porous preform by which the quartz porous preform hardly causing soot crazing even if fluorine is added in high concentration is manufactured with high yield . <P>SOLUTION: In the method of manufacturing the quartz porous preform 1 by supplying a fuel gas to a burner for synthesizing glass to form oxyhydrogen flame, simultaneously supplying a gas A containing silicon and a gas B containing fluorine to synthesize glass fine particles and depositing the glass fine particles on a starting member 2, the gas A and the gas B are supplied to a 1st gas burner 3 to synthesize the glass fine particles (α) containing fluorine and the glass fine particles (α) are deposited on the starting member 2 to form a 1st deposited part 13 and only the gas A is supplied to a 2nd burner 4 to synthesize glass fine particle (β) containing no fluorine and the glass fine particle (β) is deposited on the 1st deposited part 13 to form a 2nd deposited part 14. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
