| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method for radiation image conversion panel of which the granularity and sharpness are improved and image defects are reduced. <P>SOLUTION: In the manufacturing method for the radiation image conversion panel, in which a stimulable phosphor layer is formed on the base plate with gas-phase deposition, its film forming device has an exhaust means for setting an evaporation chamber at a vacuum state, and a vacuum meter for measuring vacuum degree. The evaporation chamber has a base plate arranging means and stuff evaporation means for depositing a stuff with stimulable phosphor on the base plate. The evaporation chamber is depressurized from the atmospheric pressure to a vacuum state, and before the deposition process depositing the stuff to the base plate by evaporating, the evaporation chamber is set at a vacuum degree P<SB>2</SB>higher than the vacuum degree P<SB>1</SB>set in the depositing process. In the manufacturing method, the chamber is set at a base plate temperature T<SB>2</SB>which is higher than the base plate temperature T<SB>1</SB>set in the depositing process and maintained for a certain period. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
