| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning device with reduced positioning errors and which is low priced. SOLUTION: In the positioning device equipped with a movable apparatus, the movable apparatus has a fixed and a moving portion of an electric conductor, the fixed portion has an electrode comprising a capacitor with the moving portion, and the electrode is constituted so as to be surrounded by guard electrodes insulated from the fixed portion. COPYRIGHT: (C)2005,JPO&NCIPI
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